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Mahdad Sadeghi

     Mahdad Sadeghi

Mahdad Sadeghi is an MBE specialist with long experience in MBE growth of GaAs and InP based material. He is responsible for the MBE system equipment, operation and maintenance at the nanofabrication facility. Has experience from clean-room procedures, processing and characterization of semiconducting material as for instance PL and X-ray diffraction techniques. He is also the main responsible for the dicing/sawing facilities at the Nanofabrication Laboratory.

Tel: +46 31 772 19 02

Mobile: +46 70 308 87 27

List of tools where Mahdad Sadeghi is tool responsible

 NameTypeTool Id
DetailsDry etch Stripper - TePla 228
DetailsOzone Cleaning - FHROzone Cleaning229
DetailsScriber - Suss - Soft wafersScribing/cleaving413
DetailsDry etch RIE - Advanced VacuumRIE etch418
DetailsDry etch RIE - Plasma-ThermRIE etch419
DetailsFurnace - Thermolyne - Open Tube/1600°CFurnace713
DetailsMBE - EPI 930MBE806
DetailsFume Hood - Solvent - Polishing preparationWet bench1001
DetailsFume hood - Solvent - Dicing preparationWet bench1002
DetailsCMP Polishing & Lapping tool - Logitech PM5 #1Lapping1006
DetailsScriber - Suss - Hard wafersScribing/cleaving1009
DetailsDicing saw - Disco DAD3350Dicing Saw1011
DetailsMBE - Riber C21MBE808
DetailsFurnace - LentonFurnace1012
DetailsCMP Polishing & Lapping tool - Logitech PM5 #2Lapping1007
DetailsDiffractometer Xray - Panalytical XPert 121
DetailsCritical point dryer - Tousimis 438
DetailsPECVD - Oxford 309
DetailsEllipsometer - J.A. Woollam RC2 135
DetailsCMP - LNF 1020
DetailsSubstrate bonder - LNF 1021
DetailsDry etch RIE - SAMCO Oxygen 423
DetailsFilm stress measurement 137
DetailsDicing Saw - Disco DAD3221 1015
DetailsFurnace - Tempress LPCVD - TEOS 7092
DetailsFurnace - Tempress LPCVD - SiN 7093
DetailsFurnace - Tempress LPCVD - Polysilicon 7091
DetailsLaser micromachining 1185
DetailsFacet polisher 1203