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//
Resources
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All tools
All tools
Name
Manufacturer
Model
Current toolratetype name
Details
Evaporator - UMS
Baltzers
UMS
C
Details
Vacuum storage (large)
-
-
A
Details
Mo sputter - MRC II
MRC
---
B
Details
Vacuum storage (small)
-
-
A
Details
E-beam/resisitive evaporator - BA
Baltzers
BA
B
Details
Glass substrate cleaner
Semitool
-
A
Details
Spin-Rinse-Dryer
---
---
A
Details
X-Ray Inspection Station
Nikon
XT V 130
B
Details
Vacuum Leak Tester
Adixen
ASM 142
A
Details
Plasma Etcher
Plasma Etch
PE-100
A
Details
Ion Beam Etcher
MSL-LK
Mark 1
A
Details
Sputter - DC / RF
FHR
---
A
Details
Ion Polisher Ilion
Gatan
llion II
A
Details
Optical Microscope
Leitz
---
A
Details
TEM/EDS - Titan
FEI
Titan Themis 200
D
Details
SEM/EDS/EBSD - Merlin
Zeiss
Merlin
C
Details
FIB/SEM - Crossbeam
Zeiss
Zeiss Crossbeam 550
D
Details
CIGS evaporator - BAK
Baltzers
BAK 550
C
Details
Vertical Furnace (oxidation)
Koyo Lindberg
Micro TF-6
A
Details
Vertical Furnace (oxidation)
Koyo Lindberg
Micro TF-6
A
Details
Vertical Furnace (general purpose)
Koyo Lindberg
Micro TF-6
B
Details
Vertical Furnace (metal anneal)
Koyo Lindberg
Micro TF-6
B
Details
Vertical Furnace - LPCVD (poly-Si, a-Si)
Koyo Lindberg
Micro TF-6LP
C
Details
Vertical Furnace - LPCVD (Si3N4, SiNx)
Koyo Lindberg
Micro TF-6LP
C
Details
Vertical Furnace - LPCVD (TEOS oxide)
Koyo Lindberg
Micro TF-6LP
C
Details
Vertical Furnace (high temp anneal)
Koyo Lindberg
Micro TF-6
B
Details
EBL (e-beam litho) - NBL
NanoBeam Ltd.
nB5
D
Details
Optical Microscope
Nikon
Eclipse ME600
B
Details
Spectroscopic reflectometer "K-MAC"
K-MAC
ST4000-DLX
A
Details
Spin-Rinse-Dryer
Semitool
470S with 102 controller
A
Details
Plasmastripper "New Lower"
Tepla
300
A
Details
EBL (e-beam litho) - JEOL
JEOL Ltd.
JBX-8100FS
D
Details
Beamer computer
Dell
Precision 3460
A
Details
ICP-RIE (Si-DRIE / aluminum etch)
PlasmaTherm
SLR with two 770 ICP chambers
D
Details
Plasmastripper "Upper"
Tepla
300
B
Details
RIE (SiO / SiN)
Advanced Vacuum
Vision 320
C
Details
IR camera
Hamamatsu
C2742
A
Details
Optical Microscope
Nikon
Eclips L200ND
A
Details
Measuring Microscope with Digital Readout
Nikon/Metronics
MM-40/Quadra Chek 200
A
Details
Stereo Microscope
Nikon
C-LEDS
A
Details
ICP-RIE (Si-DRIE) "Tegal"
Tegal
110 S/DE
D
Details
Ion Beam Etcher
Scientific Vacuum Systems
i6000 Milling System
B
Details
Resist spinner
Polos
SPIN 150i
A
Details
Wet Bench / E-beam resist spinner
Stangl / Polos
SPIN 150i
B
Details
Wet Bench / E-beam resist hot-plate
Stangl
---
B
Details
Wet Bench / E-beam resist development
Stangl
---
B
Details
TCO sputter
von Ardenne
CS730
D
Details
Sputter - magnetron "Lesker"
Kurt J. Lesker Company
CMS-18
D
Details
Sputter - magnetron "Von Ardenne"
Von Ardenne
CS 730S
D
Details
Ellipsometer "Rudolph"
Rudolph Research
---
B
Details
Sputter - table-top
Quorum
Q300TD plus
B
Details
Stylus Profiler "DektakXT"
Dektak
XT
A
Details
Four Point Probe - automatic
AIT
CMT-SR2000N
A
Details
Stylus Profiler "Dektak 150"
Bruker / Veeco
Dektak 150
A
Details
Four Point Probe
Ossila
T2001A3
A
Details
Evaporator - TMP (general use)
Kurt J. Lesker Company
PVD 75
C
Details
Evaporator - cryo (restricted use)
Kurt J. Lesker Company
PVD 75
C
Details
ALD - F120
Microchemistry
F120
C
Details
XRF
Panalytical
Epsilon 5
B
Details
ALD - MP3
-
-
C
Details
Nanoindenter
CSM
UNHT
A
Details
Laminator
Panamac
DM-12
B
Details
Optical Microscope
Leitz
Ergolux
A
Details
UHV-PVD
Prevac
N/A
D
Details
Wire Bonder - ball
Kulicke & Soffa
4524A Digital
B
Details
Wet Bench - solvent cleaning
Stangl
-
A
Details
Optical microscope
Olympus
MX63
A
Details
Hot Plate
BLE
---
A
Details
Spin Coater
BLE
Delta 10
B
Details
Resist Furnace
Heraeus
---
A
Details
Wet Bench - acid
Stangl
---
B
Details
Wet Bench - acid
Stangl
---
B
Details
Wet Bench - work desk
Stangl
---
B
Details
Wet Bench - Water rinse
Stangl
-
B
Details
Mask Aligner - front side align
Karl Süss
MA6
C
Details
Resist Furnace (110 C)
Memmert
---
A
Details
Nanoimprinter
Obducat
NIL-6
D
Details
Image Reversal / Vapor Prime Furnace
Yield Engineering Systems
YES-58TA-E
A
Details
Resist Furnace (90 C)
Memmert
---
A
Details
Vac. / Vap. Prime Furnace
Star
2000
B
Details
Spin-Spray Coater
EVG
101
B
Details
Optical Microscope
Olympus
---
A
Details
Hot Plate
Süss MicroTec
HP8 BM
A
Details
Hot Plate
Süss MicroTec
HP8 BM
A
Details
Mask Aligner - front / back side align
Karl Süss
MA6 / BA6
C
Details
Spin Coater
Süss MicroTec
LabSpin6
B
Details
Wire Bonder - ball
Kulicke & Soffa
4522
B
Details
Wire Bonder - wedge
Kulicke & Soffa
4526
B
Details
Resist Furnace
Binder
---
A
Details
Resist Laminator
MEGA Electronics
305
A
Details
Laser cutter
Östling
AIO G+ 532 nm 5 W
C
Details
HT Furnace - atm
Thermolyne
---
A
Details
Solder Furnace
LPKF
ProtoFlow S
A
Details
Pick-&-Place (w. dispenser)
LPKF
ProtoPlace S
A
Details
Screen Printer
LPKF
ProtoPrint S
A
Details
Dip Coater
Bungard
RDC 21
A
Details
Hydraulic Press (w. heater)
Bungard
RMP 210
A
Details
UV Exposure
Bungard
Hellas-E
A
Details
Spray Etcher
Solectro
---
A
Details
PCB plotter
LPKF
S104
B
Details
Spectroscopic ellipsometer
Woollam
RC2-XI
C
Details
ALD - inSE
Picosun / Woollam
P R200 / W RC2
B
Details
ALD
Picosun
R200
C
Details
Ink Jet Printer
Fuji Film
Dimatix 2831
B
Details
PL / EL Quantum Yield
Edinburgh Instruments
FLS 1000 custom
A
Details
Fume Hood – KCN
-
-
A
Details
Fume Hood - CBD
---
---
A
Details
Sulfoselenisation Furnace (SuSe)
---
---
B
Details
Sputter-RTA platform (BERTHA)
-
-
C
Details
Sputter - magnetron ZnO/CZTS
Von Ardenne
CS 600
B
Details
Parylene Coater
Paratech
Lab Top 3000
A
Details
2-photon writer
UpNano
Up250
C
Details
Extruder
Thermo Scientific
Process 11 Parallel Twin-screw Extruder
B
Details
Penta head 3D printer
nScrypt
3Dn-300
C
Details
Resist Laminator
Bungard
RLM 419 p
A
Details
Balance
Denver Instrument
XL410D
A
Details
Balance
Sartorus
BP4100
A
Details
Dicing Saw
Disco
DAD 361
B
Details
Ultrasonic Cleaner
Branson
5510
A
Details
Furnace
Heraeus
---
A
Details
Hot Plate
Heidolph
MR3003
A
Details
Ion mill PIPS
Gatan
PIPS
A
Details
LOM - Olympus - Optical Microscope
Olympus
AX70
A
Details
AFM - PSIA XE150
PSIA
XE150
B
Details
SEM/EDS - 1530
Carl Zeiss
SEM
C
Details
ESCA II
Physical Electronics
Quantera II
C
Details
LOM - Leica DVM6 - Optical Microscope
Leica Microsystems
DVM6
A
Details
Plasma Cleaner
Fischione
---
A
Details
3D Optical Profiler ZYGO
ZYGO
NexView
A
Details
Polisher
Buehler
Ecomet 3
A
Details
Ultrasonic Cleaner
Sonorex
---
A
Details
Hot Plate
Heidolph
MR3003
A
Details
Polisher
Struers
DAP-V
A
Details
Dimple Grinder
Gatan
656
A
Details
Ion Mill PIPS
Gatan
PIPS model 691
A
Details
SEM/EDS - 1550
Zeiss
LEO1550
C
Details
Ultrasonic Disc Cutter
Gatan
601
A
Details
Balance
Mettler
Toledo
A
Details
Saw - low speed
Buehler
Isomet
B
Details
Saw
Buehler
Isomet
B
Details
Embedder
Buehler
Simplimet
B
Details
Wet Grinder
Buehler
Metaserv
B
Details
Polisher
Buehler
Metaserv
B
Details
Polisher
Buehler
Phoenix
B
Details
Sputter Coater - Au/Pd
Polaron
SC7640
B
Details
Evaporator (C)
Polaron
---
B
Details
Ultrasonic Cleaner
Metason
50
A
Details
Diamond polishing
Struers
DAP V
A
Details
GDOES
Spectruma
GDA 750 HR
B
Details
Scriber
Bosch
---
B
Details
Wet Bench Etch and strip
Stangl
---
B
Details
Wet Bench Acid surface treatments
Stangl
---
B
Details
Wet Bench (RCA1 / RCA2 / HF)
Stangl
---
B
Details
Wet Bench (RCA1 / RCA2 / HF)
Stangl
---
B
Details
Wet Bench Solvent clean
Stangl
---
B
Details
Wet Bench Resist lift-off
Stangl
---
B
Details
Wet Bench Oxide etching
Stangl
---
B
Details
Wet Bench Piranha
Stangl
---
B
Details
Wet Bench Metal etching
Stangl
---
B
Details
Wet Bench - Megasonic cleaning
Stangl
---
B
Details
Wet Bench - Ultrasonic cleaning
Stangl
---
B
Details
Wet Bench - free acid / acid drain (KOH)
Stangl
---
B
Details
Wet Bench (KOH / HF)
Stangl
---
B
Details
Wet Bench (KOH-IPA / HF / warm rinse)
Stangl
---
B
Details
Fume hood – solvents
-
-
A
Details
PC12 - wet bench - Stangl
-
-
B
Details
Wet Bench - acid drain, spin dryer
Stangl
---
B
Details
Plating Station - pulse (Cu)
LPKF
MiniContac-RS
A
Details
Fume hood – acids
-
-
A
Details
RTP
MPTC
RTP-600S
B