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All tools

 NameManufacturerModelCurrent toolratetype name
DetailsWet Bench Etch and stripStangl---B
DetailsWet Bench Acid surface treatmentsStangl---B
DetailsWet Bench (RCA1 / RCA2 / HF)Stangl---B
DetailsWet Bench (RCA1 / RCA2 / HF)Stangl---B
DetailsWet Bench Solvent cleanStangl---B
DetailsWet Bench Resist lift-offStangl---B
DetailsWet Bench Oxide etchingStangl---B
DetailsWet Bench 7-upStangl---B
DetailsWet Bench Metal etchingStangl---B
DetailsWet Bench - Megasonic cleaningStangl---B
DetailsWet Bench - Ultrasonic cleaningStangl---B
DetailsPC12 - wet bench - Stangl--B
DetailsWet bench (RCA1 / RCA2 / HF)--B
DetailsWet Bench - free acid / acid drain (KOH)Stangl---B
DetailsWet Bench (KOH / HF)Stangl---B
DetailsWet Bench (KOH-IPA / HF / warm rinse)Stangl---B
DetailsWet Bench - high temp acidStangl---B
DetailsWet Bench - heating bath acidStangl---B
DetailsWet Bench - high temp acidStangl---B
DetailsWet Bench - heating bathStangl---B
DetailsWet Bench (acetone)Stangl---B
DetailsWet Bench - heating bathStangl---B
DetailsWet Bench - hot plateStangl---B
DetailsVertical Furnace (oxidation)Koyo LindbergMicro TF-6A
DetailsVertical Furnace (oxidation)Koyo LindbergMicro TF-6A
DetailsVertical Furnace (general purpose)Koyo LindbergMicro TF-6B
DetailsVertical Furnace (metal anneal)Koyo LindbergMicro TF-6B
DetailsVertical Furnace - LPCVD (poly-Si)Koyo LindbergMicro TF-6LPC
DetailsVertical Furnace - LPCVD (SiN)Koyo LindbergMicro TF-6LPC
DetailsVertical Furnace - LPCVD (TEOS oxide)Koyo LindbergMicro TF-6LPC
DetailsRTPMPTCRTP-600SB
DetailsMask Aligner - front / back side alignKarl SüssMA6 / BA6C
DetailsSpin CoaterSüss MicroTecLabSpin6B
DetailsSpin CoaterKarl SüssRC8 (Gyroset)B
DetailsSpin CoaterBLEDelta 10B
DetailsHot PlateSüss MicroTecHP8 BMA
DetailsHot PlateSüss MicroTecHP8 BMA
DetailsHot PlateBLE---A
DetailsVac. / Vap. Prime FurnaceStar2000B
DetailsResist FurnaceHeraeus---A
DetailsWet Bench / E-beam resist spinnerStangl / PolosSPIN 150iB
DetailsWet Bench / E-beam resist hot-plateStangl---B
DetailsWet Bench / E-beam resist developmentStangl---B
DetailsWet Bench - acidStangl---B
DetailsWet Bench - acidStangl---B
DetailsWet Bench - work deskStangl---B
DetailsWet Bench - Water rinseStangl-B
DetailsMask Aligner - front side alignKarl SüssMA6C
DetailsResist Furnace (110 C)Memmert---A
DetailsCAD / conversion workstation------A
DetailsNanoimprinterObducatNIL-6D
DetailsSpin-Spray CoaterEVG101B
DetailsICP-RIE (Si-DRIE / aluminum etch)PlasmaThermSLRD
DetailsPlasmastripper "Upper"Tepla300B
DetailsRIE (SiO / SiN)Advanced VacuumVision 320C
DetailsSputter - magnetron "Von Ardenne"Von ArdenneCS 730SD
DetailsEvaporator "Edwards"EdwardsAuto 306 FL400A
DetailsPECVDOxford133E
DetailsOptical MicroscopeLeitz ErgoluxA
DetailsOptical MicroscopeLeitz---A
DetailsOptical MicroscopeOlympus---A
DetailsOptical MicroscopeNikonOptiphotA
DetailsOptical MicroscopeNikonSMZ1BA
DetailsStress MeterFSM500TCB
DetailsEllipsometer "Rudolph"Rudolph Research---B
DetailsOptical MicroscopeNikonEclipse ME600B
DetailsIR cameraHamamatsuC2742A
DetailsBalanceDenver InstrumentXL410DA
DetailsBalanceSartorusBP4100A
DetailsSaw - low speedBuehlerIsometB
DetailsSawBuehlerIsometB
DetailsEmbedderBuehlerSimplimetB
DetailsWet GrinderBuehlerMetaservB
DetailsWet GrinderBuehlerMetaservB
DetailsPolisherBuehlerMetaservB
DetailsPolisherBuehlerPhoenixB
DetailsSputter Coater (Au / Pd)Polaron---B
DetailsEvaporator (C)Polaron---B
DetailsUltrasonic CleanerMetason50A
DetailsHot PlateHeidolphMR3003A
DetailsBalanceMettlerToledoA
DetailsOptical Microscope "Olympus"OlympusAX70A
DetailsAFMPSIAXE150B
DetailsSEM "440"ZeissLEO440B
DetailsSEM / EDS "1550"ZeissLEO1550C
DetailsESEM / (EBL)FEIXL30 ESEMC
DetailsTEMJEOL2000 FXIIC
DetailsTEM / EDS / EELS TecnaiFEITecnai F30 STD
DetailsUltrasonic Disc CutterGatan601A
DetailsPolisherStruersDAP-VA
DetailsDimple GrinderGatan656A
DetailsDimple GrinderGatan656A
DetailsIon Mill PIPSGatanPIPS model 691A
DetailsPlasma CleanerFischione---A
DetailsOptical MicroscopeReichert---A
DetailsOptical MicroscopeReichert---A
DetailsUltrasonic CleanerSonorex---A
DetailsHot PlateHeidolphMR3003A
DetailsEx-situ ManipulatorMitutoyo---A
DetailsFIB / SEM / CryoFEIStrata DB235D
DetailsPattern GeneratorHeidelbergDWL 200B
DetailsSpin-Rinse-DryerSemitool870SA
DetailsFour Point Probe - automaticAITCMT-SR2000NA
DetailsVertical Furnace (high temp anneal)Koyo LindbergMicro TF-6B
DetailsDicing SawDiscoDAD 361B
DetailsWire Bonder - ballKulicke & Soffa4522B
DetailsWire Bonder - wedgeKulicke & Soffa4526B
DetailsE-Beam evaporator - FlutterUU---E
DetailsEvaporator - TMP (general use)Kurt J. Lesker CompanyPVD 75A
DetailsEvaporator - cryo (restricted use)Kurt J. Lesker CompanyPVD 75A
DetailsPhotomask ProcessorACPCapSpinE
DetailsStylus Profiler "Dektak 150"Bruker / VeecoDektak 150A
DetailsICP-RIE (Si-DRIE) "Tegal"Tegal110 S/DED
DetailsPick-&-Place (w. dispenser)LPKFProtoPlace SA
DetailsScreen PrinterLPKFProtoPrint SA
DetailsHydraulic Press (w. heater)BungardRMP 210A
DetailsSolder FurnaceLPKFProtoFlow SA
DetailsResist LaminatorBungardRLM 419 pA
DetailsUV ExposureBungardHellas-EA
DetailsResist FurnaceBinder---A
DetailsInk Jet PrinterFuji FilmDimatix 2831B
DetailsDip CoaterBungardRDC 21A
DetailsSpray EtcherSolectro---A
DetailsParylene CoaterParatechLab Top 3000A
DetailsHT Furnace - atmThermolyne---A
DetailsPlasma EtcherPlasma EtchPE-100A
DetailsMeasuring Microscope with Digital ReadoutNikon/MetronicsMM-40/Quadra Chek 200A
DetailsStereo MicroscopeNikonC-LEDSA
DetailsX-Ray Inspection StationNikonXT V 130B
DetailsMeasurement StationNational InstrumentsNI92xxA
DetailsResist Furnace (90 C)Memmert---A
DetailsOptical Microscope (mask insp.)NikonEclips L200NDA
DetailsUltrasonic CleanerBranson5510A
DetailsFurnaceHeraeus---A
DetailsPolisherBuehlerEcomet 3A
DetailsOptical Microscope - inverted, "Reichert"ReichertMEF4MA
DetailsOptical MicroscopeLeitzSecolux 6x6A
DetailsSputter - magnetron "Lesker"Kurt J. Lesker CompanyCMS-18D
DetailsBench-top Vacuum OvenMTI Corporation---E
DetailsCIGS evaporator - BAKBaltzersBAK 550E
DetailsEvaporator - UMSBaltzersUMSE
DetailsCIGS evaporator - M. PiloteVon Ardenne---E
DetailsSpin-Rinse-Dryer------E
DetailsMo sputter - MRC IIMRC---E
DetailsScriberBosch---E
DetailsE-beam/resisitive evaporator - BABaltzersBAE
DetailsFume Hood - CBD------E
DetailsALD - F120MicrochemistryF120E
DetailsTube Furnace - pipe 1Temprex---E
DetailsSulfoselenisation Furnace (SuSe)------E
DetailsSputter - magnetron ZnO/CZTSVon ArdenneCS 600E
DetailsLaminatorPanamacDM-12E
DetailsUltrasonic HomogenizerBandelinHD 2200E
DetailsImage Reversal / Vapor Prime FurnaceYield Engineering SystemsYES-58TA-EA
DetailsALDPicosunR200C
DetailsSEM / EDS / EBSD "Merlin"ZeissMerlinC
DetailsNanoindenterCSMUNHTE
DetailsVacuum Leak TesterAdixenASM 142A
DetailsFume hood – solvents--A
DetailsFume hood – acids--A
DetailsElectron Beam Lithograph EBLNanoBeam Ltd.nB5D
DetailsResist spinnerPolosSPIN 150iA
DetailsSpectroscopic reflectometer "K-MAC"K-MACST4000-DLXA
DetailsIon Polisher IlionGatanllion IIA
DetailsStylus Profiler "DektakXT"DektakXTA
DetailsVacuum storage (large)--E
DetailsVacuum storage (small)--E
DetailsALD - MP3--E
DetailsCZTS sputter--E
DetailsResist LaminatorMEGA Electronics305A
DetailsWet Bench - solvent cleaningStangl-A
DetailsSEM / EDS "1530"Carl ZeissSEMC
DetailsDiamond polishingStruersDAP VA
DetailsFume Hood – KCN--E
DetailsGlass substrate cleanerSemitool-A
DetailsTEM / EDS TitanFEITitan Themis 200D
DetailsESCA IIPhysical ElectronicsQuantera IIC
DetailsSulfoselenisation RTP (Bettan)DSeTec-A
DetailsIon Beam EtcherMSL-LKMark 1A
DetailsALD - inSEPicosun / WoollamP R200 / W RC2B
DetailsOptical Profiler ZYGOZYGONexViewA
DetailsOptical microscopeOlympusMX63A
DetailsIon Beam EtcherScientific Vacuum Systemsi6000 Milling SystemB
DetailsLaser cutterÖstlingAIO G+ 532 nm 5 WC
DetailsTCO sputtervon ArdenneCS730 D
DetailsXRFPanalyticalEpsilon 5B
DetailsGDOESSpectrumaGDA 750 HRB
DetailsSpectroscopic ellipsometerWoollamRC2-XIA
DetailsPCB plotterLPKFS104A